TK5142

FEATURES

  • Wafer Transfer System
  • Target device - Wafer 2",4",6",8"

SPECIFICATION

Function Wafer transfer
Target device Wafer (2”, 4”, 6”, 8”)
Pass line 865mm
Loading/unloading method Automatic single arm robot
Sheet, Magazine Loading : 25 sheets/a magazine, 2 magazines
Unloading : 12 wafers/a magazine, 2 magazines
Vision 1 vision
SXGA Mono color[RED lamp]
Reading Section 1 DMC Reader(QR Code), 1 Barcode Reader
Control PC I7 Quad Core, 8G Byte Memory, Window 7, 64bit
Power AC220V, 50/60Hz 10A, 3.3 kW, 1 Phase
Dimension W950 x D850 x H1650mm
Weight 700kg

SEQUENCE

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