TIS Co., Ltd.

PR Coater

Products

PR Coater

PR Coater
PR Coater
PR Coater
PR Coater
PR Coater
PR Coater
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Features
  • Configured with a single port for loading/unloading
  • Loading port supports mixed use of 4″, 6″, and 8″
Specification
ItemDescription
FunctionPR Coating
Target Device4” Wafer
Air Supply5~7 kg/㎠
DimensionW 1,000 x D 940 x H 1,900 (mm)
Weight500kg
Semiconductor Products