Wafer Marker & Sorter
Features
- Configured with a loading/unloading multi-port
- Supports mixed use of 4″, 6″, and 8″ wafers
- Wafer top & back side marking (optional)
Specification
| Item | Description |
|---|---|
| Function | Wafer Marking & Sorting |
| Target Device | Wafer (supports mixed use of 4″, 6″, and 8″; COK required) |
| Wafer L/UL | Cassette |
| Laser Source | Customization |
| Dimension | W 1,300 x D 1,350 x H 1,800 (mm) |
| Weight | 800 kg |
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