TK5180

FEATURES

  • Operation items - PR Stripping, Cleaning, Drying
  • Target wafer - Ring frame attached wafer (2”, 4”, 6”, 8”)
  • Loading/unloading method - 2 Magazines/ Automatic gripper

SPECIFICATION

Operation items PR Stripping, Cleaning, Drying
Target wafer Ring frame attached wafer (2”, 4”, 6”, 8”)
Loading/unloading method 2 Magazines/ Automatic gripper
Capacity of chemical tank 11.4L
Chemicals DPS, IPA, DI water
Dryer N2, compressed air
Air supply 5-6 kg/cm²
Control PC I7 Quad Core, 8G Byte Memory, Window 7, 64bit
Power AC220V, 50/60Hz 20A, 4.4 kW, 1 Phase
Dimension W1035 x D1635 x H1715 mm
Weight 1000kg

SEQUENCE

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