TSE1037
FEATURES
- PR Stripper System
- Operation items - PR Stripping, Cleaning, Drying
- Target wafer - Ring frame attached wafer (2”, 4”, 6”, 8”)
- Loading/unloading method - 2 Magazines/ Automatic gripper
SPECIFICATION
| System name | PR Stripper System |
| Function | PR Stripping, Cleaning, Drying |
| Target device | Ring frame attached wafer (2”, 4”, 6”, 8”) |
| Wafer thickness | 1.5 ~ 5t |
| Loading/unloading method | 2 Magazines/ Automatic gripper |
| Capacity of chemical tank | 11.4L |
| Chemicals | DPS, IPA, DI water |
| Dryer | N2, compressed air |
| Air supply | 5-6 kg/cm² |
| Control PC | I7 Quad Core, 8G Byte Memory, Window 7, 64bit |
| Power | AC220V, 50/60Hz 20A, 4.4 kW, 1 Phase |
| Dimension | W1035 x D1635 x H1715(mm) |
| Weight | 1000kg |
