Re Ring Auto Handler
영상 확인하기Features
- Wafer / Ring-Frame 합착
Specification
| Item | Description |
|---|---|
| Function | Re-Ring Auto Handler |
| Lo/Unloading | Loading : 각 100 매 Unloading : 100 매 |
| Stage | 2 Stage |
| Wafer Align Method | Camera Vision |
| Air Supply | 5~7 kg/㎠ |
| Dimension | W 1,964 x D 2,020 x H 2,320 (mm) |
| Weight | 1,500kg |
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