Wafer Cosmetic Inspector
Features
- Loading/Unloading 한 Port로 구성
- Wafer 4”,6”,8” 혼용 사용 가능
- 상하부 광학계(Vision)로 Wafer Edge Chipping 상하 동시 검사 수행
Specification
| Item | Description |
|---|---|
| Target Device | Wafer (4”,6”,8” 혼용 사용가능, COK필요) |
| Cassette | 3EA |
| Inspection Item | Wafer Chipping (Min. Chipping Size → 100µm) |
| Dimension | W 1,250 x D 1,150 x H 1,800 (mm) |
| Weight | 700kg |
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Package
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