EFEM
영상 확인하기Features
- 파티클 강제 배기 및 배기 체계 모니터링 적용
- Wafer 고속 Dumping Multi Gripper 적용
- WTR, Load Port, Buffer 적용
Specification
| Item | Description |
|---|---|
| PN2 | ≤0.2Mpa ±0.02Mpa |
| Vacuum | ≥-80kPa ±2kPa |
| Noise Level | ＜65 Db |
| Power | Source AC(GPS) 1Phase 220V 30A(50~60Hz) |
| Dimension | W 2,400 x D 750 x H 3,000 (mm) |
| Weight | 1,300kg |
System Parts Configuration
Foup Opener
Index WTR
Process WTR
Buffer Unit
Load port
Semiconductor Products
PR Coater
Wafer Series
PR Striper
Wafer Series
DI Cleaner
Wafer Series
Wafer Cosmetic Inspector
Wafer Series
Wafer Marker & Sorter
Wafer Series
Wafer Sorter
Wafer Series
Wafer Prober
Wafer Series
Wafer Plasma
Wafer Series
Re Ring Auto Handler
Die Series
Ring Detach Auto Handler
Die Series
Die Tester
Die Series
SIP 실장 검사기
Package
Auto Visual Inspection
Package
UDP
Package
Package Laser Marker
Package