티아이에스(주)

PR Coater

Products

PR Coater

PR Coater
PR Coater
PR Coater
PR Coater
PR Coater
PR Coater
previous arrow
next arrow
Video영상 확인하기
Features
  • Loading/Unloading 한 Port로 구성
  • Loading Port 4”,6”,8” 혼용 사용 가능
Specification
ItemDescription
FunctionPR Coating
Target Device4” Wafer
Air Supply5~7 kg/㎠
DimensionW 1,000 x D 940 x H 1,900 (mm)
Weight500kg
Semiconductor Products