Wafer Prober
Features
- Loading/Unloading 한 Port로 구성
- Wafer 4”,6”,8” 혼용 사용 가능
- 상하부 광학계(Vision)로 상하 동시 검사 수행
Specification
| Item | Description |
|---|---|
| Function | Wafer Probe |
| Target Device | Wafer (4”,6”,8” 혼용 사용가능, COK필요) |
| Contact Accuracy | ± 2㎛ |
| Z-Force | 150kgf |
| Chunk Temp | Room ~ + 150℃ |
| Dimension | W 1,270 x D 1,110 x H 1,700 (mm) |
| Weight | 2,000 kg |
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