DI Cleaner
영상 확인하기Features
- Loading/Unloading 한 Port로 구성
- Wafer 4”,6”,8” 혼용 사용 가능
- Spin Chuck Guide 단차 적용으로 다양한 사이즈의 Wafer 대응
Specification
| Item | Description |
|---|---|
| Function | Wafer Clean |
| Target Device | Wafer (4”,6”,8” 혼용 사용가능, COK필요) in Ring Frame |
| Spin RPM | Max. 3,000 |
| Chuck | Vac. Type |
| Dimension | W 1,050 x D 850 x H 1,700 (mm) |
| Weight | 750kg |
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